Scientific committee

• Mohamed BOUFNICHEL

STMicroelectronics, Tours, France

• Christophe CARDINAUD

IMN, Nantes, France

• Mike COOKE

Oxford Instruments, Bristol, Yatton, UK

• Jean-François DE MARNEFFE

IMEC, Leuven, Belgium

• Rémi DUSSART

GREMI, University of Orléans, France

• Philippe GAUBERT

Tokyo Electron Technology

• Thorsten LILL

LAM research

• Makoto SEKINE

Nagoya University, Japan

• Thomas TILLOCHER

GREMI, University of Orléans, France